Rudolph Technologies, Inc. (NYSE: RTEC) today announced that a leading
outsourced assembly and test facility (OSAT) has ordered Rudolph’s
Solution for panel-level packaging production, which includes a
repeat order for the JetStep®
panel lithography system. Rudolph’s StepFAST Solution is a
feed-forward adaptive shot technology that addresses process variations,
die placement errors and dimensionally unstable materials that are
common in existing and next-generation advanced packaging technologies.
The elements included in the StepFAST Solution are Rudolph’s Firefly™
system for die position metrology, Discover® software for
advanced analytics, and the JetStep system for exposure.
“Uneven die placement on reconstituted panels, followed by die shift
from the compression molding process, is a critical challenge for fan-out
panel-level packaging,” said Alex Chow, vice president of strategic
marketing. “Measuring the die placement prior to exposure is necessary
to achieve overlay and yield thresholds, but measurement is not enough.
Rudolph’s StepFAST Solution utilizes Discover software to analyze the
error components and generate the appropriate correction file and
exposure map for the JetStep lithography system to execute. Discover
software automatically determines the optimal field size for exposure
based on the overlay specifications and actual die placement error.”
“We are extremely grateful to have collaborated with this customer as
they developed their ground-breaking panel packaging line using their
first JetStep panel lithography system,” said Rich Rogoff, vice
president and general manager of Rudolph’s Lithography Systems Group.
“Their repeat order for a second JetStep panel system, which includes
our StepFAST Solution, is a verification that our customers need
complete solutions that provide a competitive advantage in the
The StepFAST Solution is exclusive to Rudolph Technologies and can
double lithography throughput while providing 90% improvement on
registration with feed-forward advanced process control. The Firefly
system performs 2D defect inspection and die position metrology in a
single pass, feeding critical metrology data to the Discover software
engine to initiate the StepFAST Solution process. The method also
provides a means to balance productivity (throughput) against yield,
adding an extra dimension of flexibility for optimizing profitability.
Systems and software are expected to ship in the fourth quarter.
For more information about StepFAST Solution, visit www.rudolphtech.com.
About Rudolph Technologies
Rudolph Technologies, Inc. is a
leader in the design, development, manufacture and support of defect
inspection, lithography, process control metrology, and process control
software used by semiconductor and advanced packaging device
manufacturers worldwide. Rudolph delivers comprehensive solutions
throughout the fab with its families of proprietary products that
provide critical yield-enhancing information, enabling microelectronic
device manufacturers to drive down costs and time to market of their
devices. Headquartered in Wilmington, Massachusetts, Rudolph supports
its customers with a worldwide sales and service organization.
Additional information can be found on the Company’s website at www.rudolphtech.com.
Safe Harbor Statement
This press release contains
forward-looking statements within the meaning of the Private Securities
Litigation Reform Act of 1995 (the “Act”) which include the benefit to
customers of Rudolph’s products, Rudolph’s business momentum and future
growth and the market demand for semiconductors generally as well as
other matters that are not purely historical data. Rudolph wishes to
take advantage of the “safe harbor” provided for by the Act and cautions
that actual results may differ materially from those projected as a
result of various factors, including risks and uncertainties, many of
which are beyond Rudolph’s control. Such factors include, but are not
limited to, Rudolph’s ability to plan and manage its resources and
production capability, including its supply chain and fluctuations in
customer capital spending. Additional information and considerations
regarding the risks faced by Rudolph are available in Rudolph’s Form
10-K report for the year ended December 31, 2018 and other filings with
the Securities and Exchange Commission. As the forward-looking
statements are based on Rudolph’s current expectations, the company
cannot guarantee any related future results, levels of activity,
performance or achievements. Rudolph does not assume any obligation to
update the forward-looking information contained in this press release.